PECVD Graphite Boat Cooling Room

PECVD Graphite Boat Cooling Room
Basic Functions:
1. Make accurate positioning of the graphite boat;
2. Filtered clean air blowing from the blower dispersed graphite boat to ensure rapid cooling of the graphite boat.

Technical Requirements:
1. The cooling room is made of stainless steel to ensure the stable of the equipment;
2. Incoming air must be filtered by the filter;
3. Two blowers, air flow is of 1000m3/h;
4. Induced draft cover and manual control valve are installed at the top of graphite boat to ensure adjustable air flow and wind speed;
5. In order to achieve energy-saving effect, self-control devices must be installed. When the graphite boat into the cooling room, the devices start automatically. When cooling to the required time or the graphite boat leaves the room, the devices can automatically stop;
6. In order to prevent the graphite boat moving after impact, the anti-shock tail must adopt the tail which can be installed with expansion screw.

Graphite Boat Loading Room Basic Functions:
1. Make accurate positioning of the graphite boat;
2. The graphite boat can tilt 15 degrees or rotated 180 degrees inside;
3. Bring circulating blow with purified air filtered by medium air filter and HEPA filter into the machine timely according to the requirements.

Technical Requirements:
1. The cooling room is made of stainless steel to ensure the stable of the equipment;
2. Two blowers, air flow is of 1000m3/h;
3. With medium air filter and HEPA filter;
4. In order to achieve energy-saving effect, self-control devices must be installed. When the graphite boat into the cooling room, the devices start automatically. When cooling to the required time or the graphite boat leaves the room, the devices can automatically stop;
5. In order to prevent the graphite boat moving after impact, the anti-shock tail must adopt the tail which can be installed with expansion screw.